Microscopio di misura con una accuratezza di misura in XY tra le più alte : 0,9+3L/1000 μm*.La serie Hyper MF-B/MF-UB offre le seguenti caratteristiche :Funzione LAF (Laser Auto Focus) selezionabile.Controllo motorizzato sui tre assiFacilità d'uso e ottima ripetibilitàUnità motorizzata ed autofocus in dotazioneControllo motorizzato sui tre assi via JoystickAmpia gamma di sistemi di fissaggio (es. supporti per wafers o supporti inclinabili di centraggio)*1. (L = lunghezza misurata (mm) nel piano XY, con tavola scarica).
Specifiche di prodotto
Observation image
|
Erect image |
Optical tube
|
Reticle projection method, with TV mount, Optical path ratio Hyper MF : Monocular or binocular tube (optional depression : 25°) Hyper MF-U : Siedentoph type (pupil distance adjustment : 51 - 76 mm), 1X tube lens, Binocular tube (depression : 25°) |
Eyepiece
|
Hyper MF : Optional 10X, 15X, 20X Hyper MF-U : 10X (field No. : 24 mm), Optional : 15X, 20X |
Turret (optional)
|
Hyper MF-U : Motorized Objective (optional) : M / BD Plan Apo objective from 1X to 100X |
Transmitted illumination
|
Light source : Halogen bulb (12V, 100W)(fiber-optic cold light illumination) Optical system : Telecentric illumination with adjustable aperture diaphragms Functions : Light intensity adjustable, 100 steps brightness adjustment |
Surface illumination
|
Light source : Halogen bulb (12V, 50W) Optical system : Koehler illumination with adjustable aperture diaphragms Functions : Light intensity adjustable, 100 steps brightness adjustment |
Accuracy
|
(0.9+3L/1000)μm, L = XY axis measuring length (mm) when not loaded |
Laser auto focus function
|
Available |
Graduation
|
0,01µm |
Measuring unit
|
Linear encoder |
Dimensions (WxDxH)
|
160 x 476 x 381 mm (power unit) Hyper MF : 880 x 913 x 730 mm (main unit) Hyper MF-U : 880 x 913 x 770 mm (main unit) |
Swiveling function (left)
|
±3˚ |
XY stage travel range
|
250 x 150 mm |
Effective glass size
|
300 x 200 |
Model
|
Hyper MF-UE2515B |
Data output
|
Via RS-232C interface |
Observation type
|
Bright Field |
Power supply
|
220/240V AC, 50/60 Hz |
XY stage top size
|
460 x 350 |
Optional accessories
|
See MF accessories for Hyper MF or MF-U models |
Max. stage loading
|
30 |
Max. workpiece height
|
150 |
Mass
|
14 kg (power unit) Hyper MF : 250 kg (main unit) Hyper MF-U : 255 kg (main unit) |
Article Type
|
Product |
Articlegroup
|
321 |
Articlegroup Subgroup
|
32100 |
relevant for catalog
|
International |